Lars Breivik

Senior Process Scientist

Lars Breivik

Unit:: SINTEF Digital
Department:: Smart Sensors and Microsystems
Office:: Oslo

Publications

2019 Academic article
Edgeless silicon sensors fabricated without support wafer
2012 Academic article
Fabrication process for CMUT arrays with polysilicon electrodes, nanometre precision cavity gaps and through-silicon vias
2006 Academic article
Development of cost-effective high-density through-wafer interconnects for 3D microsystems

Other

2021 Poster
Investigation of surface passivation thin film materials for improved predictable quantum efficiency detectors
2019 Lecture
Fabrication of active-edge detectors without support wafer using a unique "perforated edge" approach
2019 Lecture
Characterization of active-edge detectors fabricated without support wafer
2018 Poster
A novel and simple method for fabrication of edgeless silicon radiation detectors
2018 Academic lecture
Development of N-on-P planar technology at SINTEF MiNaLab
2018 Academic lecture
Status of 3D detector development at SINTEF for ITk Upgrade
2011 Poster
CMUT ARRAYS WITH POLYSILICON BOTTOM ELECTRODES AND NANO-METER PRECISION CAVITY GAPS
2010 Academic lecture
Micromachined optical microphone based on a modulated diffractive lens
2009 Academic lecture
Micromachined optical microphone based on a modulated diffractive lens
2005 Academic lecture
Development of cost-effective high-density through-wafer interconnects for 3D microsystems

Contact info

Visiting address:
Gaustadalléen 23 C
0373 Oslo