Publications
- Rate-Dependent Evolution of Microstructure and Stress in Silicon Films Deposited by Electron Beam Evaporation
- On the Evolution of Stress and Microstructure in Radio Frequency-Sputtered Lead-Free (Ba,Ca)(Zr,Ti)O3 Thin Films
- High-Rate Epitaxial Growth of Silicon Using Electron Beam Evaporation at High Temperatures
- Reliable Pb(Zr,Ti)O3-based thin film piezoelectric micromirrors for space-applications Read publication
- High-quality dense 3D point clouds with active stereo and a miniaturizable interferometric pattern projector Read publication
- On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems Read publication
- Electrochemically driven degradation of chemical solution deposited ferroelectric thin-films in humid ambient Read publication
- Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments Read publication
- EPITAXIAL GROWTH OF SILICON BY ELECTRON BEAM EVAPORATION DEPOSITION
Other
- Energy Harvesting from Natural and Anthropogenic Vibrations
- Controlling light with nanostructures and piezoMEMS
- Controlling light with nanostructures and piezoMEMS
- Roboter kan finne og fjerne skrot i verdensrommet
- Utvikler robot-øyne som kan finne og fjerne skrot i verdensrommet
- Thin film piezoMEMS and optics
- Står foran en optisk revolusjon
- Stress and microstructure in Si films by high-rate e-beam
- High-Rate Deposition of Epitaxial Silicon by E-beam Evaporation
- Stress considerations for sputtered lead-free (Ba,Ca)(Zr,Ti)O3 thin films
