ElpowerLab
3D Optical Profiler
Model: Contour GT-K 3D Optical Profiler
Contact persons
Manufacturer: BRUKER
Technique: Non-Contact Surface Metrology Measurement based on interferometry of wither white or green light.
- Two objectives: 5x and 50x
- Two extra lenses: 0.55x and 2x
- Electronic xy-stage and height control
- 3 measurement modes
- VSI: white light with vertical resolution 3 nm
- VXI: extension of VSI with additional data processing
- PSI: green light with vertical resolution < 0.1 nm