The department of Microsystems and Nanotechnology at SINTEF has a
800 m² cleanroom in the MiNaLab building.
Our focus is on silicon sensor and actuator research, prototyping and small-scale production.
The services offered by the department of Microsystems and Nanotechnology include feasibility studies, device design, prototyping, process development, and small and medium scale production in the MiNaLab cleanroom laboratory.
We are certified according to ISO 9001:2015, ISO 14001:2015 og ISO 45001:2018.
Our group at SINTEF develop and manufacture silicon radiation sensors adapted to custom specifications and requirements. Through our in-house design and world class cleanroom facilities, we offer flexibility on every level, from initial design and...
MEMS (Micro-Electro-Mechanical-System) based sensors, e.g. pressure sensors and accelerometers, are small, lightweight, cost efficient and suitable for high volume production.
Piezoelectric Microsystems or piezoMEMS is an important technology platform with a multitude of possible applications
Microsystems for medical, biological, and environmental applications with focus on microfluidic technologies, biosensors, and sensors for in vivo measurements.
Micro-opto-electromechanical systems (MOEMS or optical MEMS), are systems with structures in the micro- to millimeter range whose purposes are to manipulate light. Today's MOEMS devices include waveguides, moving mirrors and diffractive gratings.
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Biomedical |
Environmental |
Aviation and space |
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Energy, oil and gas |
Consumer electronics |
Scientific and medical instrumentation |
Visiting address:
Gaustadalléen 23 C
0373 Oslo, Norway
Map and directions
Research Director:
Mats Stefan Carlin
