Abstract
Packaging processes, patterned gold-layers, electrodes, hydrophobic patterned surfaces, surface activation for protein attachment, and piezoelectric films are examples of mixed technology or add-on processes that can enhance the functionality of microsystem devices. The portfolio of possible applications for the microBUILDER technology is further increased as more processes are developed depending on customers' requests and requirements. Three examples of possible mixed technologies are presented; a flow rate sensor, an in vivo sensor for human brain pressure measurements and a biosensor for label free detection.
