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Reconfigurable near-infrared optical filter with a micromechanical diffractive Fresnel lens

Abstract

We have fabricated and characterized a micromechanical Fresnel lens that serves as a reconfigurable filter for near-infrared spectrometry, for the analysis of gas, liquids, or solids. The lens consists of silicon segments that can be individually actuated. Moving the segments vertically controls the spectrum of the light that is focused on a detector. The holographic pattern on top of the segments permits both focusing of the light and spectral control. We have demonstrated experimentally the desired spectral control of the filter.

Category

Academic article

Language

English

Author(s)

  • Odd Løvhaugen

Affiliation

  • SINTEF Digital / Smart Sensors and Microsystems

Year

2005

Published in

IEEE Photonics Technology Letters

ISSN

1041-1135

Volume

17

Issue

12

Page(s)

2622 - 2624

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