Abstract
Silicon MEMS technology is suitable for manufacturing of sensors or actuators, while low-cost polymer chips suits better for passive fluidic functions. We have developed a standardized interface between silicon/glass chips and polymer chips and used this for integration of two silicon flow sensors in one polymer chip. The polymer chip provides easy to use fluidic connections to other chips or to the world. In addition, standard electronics for sensor read-out has been developed. microBUILDER customers are now invited to use the new platform for integration of silicon fluidic elements with polymers. The microBuilder project has developed a mixed-technologies flow-sensor module for its micro-fluidic construction kit. This mixed-technology approach combines the best features of silicon-based MEMS technology, electronics and polymer-based microfluidics and packaging. The module contains two micro-machined flow sensors designed by SINTEF and produced by Infineon SensoNor’s multi-project wafer MultiMEMS process with a deep reactive ion etch (DRIE) add-on process at SINTEF. The flow sensor is connected to the fluidic plastic chip produced by thinXXS using a gasket and a clamp to achieve tight fluidic connection. The electrical connection of the sensor chips to the read-out electronics designed by HSG-IMIT is done by a flex-board. The whole module has four fluidic ports and the electronics can be accessed by a FireWire type plug connector. The module is designed for usage in the microfuidics construction kit where also other microfluidic modules such as mixers and fluid splitters are available. This kind of mixed-technology approach also enables various other application areas utilising the advantages of different production methods and materials.