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Grain structure of Aluminium films for wafer-level thermocompression bonding

Category

Academic lecture

Client

  • Research Council of Norway (RCN) / 247781

Language

English

Author(s)

  • Nishant Malik
  • Vishnukanthan Venkatachalapathy
  • Erik Poppe
  • Kari Schjølberg-Henriksen
  • Maaike Margrete Visser Taklo
  • Terje Finstad

Affiliation

  • University of Oslo
  • SINTEF Digital / Smart Sensors and Microsystems

Presented at

WaferBond

Date

07.12.2015 - 09.12.2015

Year

2015

View this publication at Cristin