High Volume Piezoelectric Thin Film Production Process for Microsystems
Category
Academic lecture
Language
English
Author(s)
- Frode Tyholdt
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
Presented at
Commercialization of Micro-, Nano-, and Emerging Technologies (COMS) 2012
Place
Tønsberg, Norway
Date
24.07.2012 - 27.07.2012
Organizer
MANCEF
