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Study and Fabrication of Two Types of MEMS-Based Deformable Diffraction Surfaces for NIR Spectroscopy

Category

Academic lecture

Language

English

Author(s)

  • Matthieu Jean P Lacolle
  • Håkon Sagberg
  • Dae-Sung Lee
  • Ib-Rune Johansen
  • Odd Løvhaugen
  • Olav Solgaard
  • Aasmund Sveinung Sudbø

Affiliation

  • University of Oslo
  • Stanford University
  • SINTEF Digital / Smart Sensors and Microsystems

Presented at

Norwegian Electro-optics Meetin

Place

Tønsberg

Date

02.05.2004 - 04.05.2004

Organizer

Optikk- og akustikkgruppa i Norsk fysisk selskap

Year

2004

View this publication at Cristin