Metal Films for MEMS Pressure Sensors: Comparison of Al, Ti, Al-Ti Alloy and Al/Ti Film Stacks

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Category

Academic chapter/article/Conference paper

Client

Research Council of Norway (RCN) / 247781

Language

English

Author(s)

Elizaveta Vereshchagina
Erik Poppe
Kari Schjølberg-Henriksen
Markus Wöhrmann
Sigurd Moe

Affiliation

SINTEF Digital / Smart Sensors and Microsystems
Fraunhofer Institute for Mechanics of Materials IWM

Year

2018

Publisher

IEEE (Institute of Electrical and Electronics Engineers)

Book

2018 7th Electronic System-Integration Technology Conference (ESTC), Dresden, Germany, 18-21 Sept. 2018

ISBN

978-1-5386-6814-6

DOI

https://doi.org/10.1109/estc.2018.8546422

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https://hdl.handle.net/11250/2581675

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