Statistical analysis of structure loss in Czochralski silicon growth
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Category
Academic article
Client
- Research Council of Norway (RCN) / 257639
Language
English
Author(s)
- Øyvind Sunde Sortland
- Moez Jomâa
- Mohammed Mhamdi
- Eivind Johannes Øvrelid
- Marisa Di Sabatino Lundberg
Affiliation
- Norwegian University of Science and Technology
- SINTEF Industry / Metal Production and Processing
Year
2019Published in
AIP Conference Proceedings
ISSN
0094-243X
Publisher
AIP Publishing (American Institute of Physics)
Volume
2147
Issue
1