Assessment of feature engineering and long short-term memory for structure loss identification from process data in monocrystalline silicon growth by the Czochralski method

Client

• Research Council of Norway (RCN) / 257639

Author(s)

• Øyvind Sunde Sortland
• Mohammed Mhamdi
• Moez Jomâa

Affiliation

• Norwegian University of Science and Technology
• SINTEF Industry / Metal Production and Processing

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