On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems

Author(s)

• Runar Dahl-Hansen
• Frode Tyholdt
• Jo Gjessing
• Andreas Vogl
• Paul Wittendorp
• Jon Vedum
• Per Thomas Martin Tybell

Affiliation

• Norwegian University of Science and Technology
• SINTEF Industry / Sustainable Energy Technology
• SINTEF Digital / Smart Sensors and Microsystems

Issue

1

DOI

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