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Atomic-scale 3D imaging of individual dopant atoms in an oxide semiconductor

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Category

Academic article

Client

  • Research Council of Norway (RCN) / 269842
  • Research Council of Norway (RCN) / 197405
  • Research Council of Norway (RCN) / 295864
  • ERC-European Research Council / 863691
  • Research Council of Norway (RCN) / 302506
  • Sigma2 / NN9264K

Language

English

Author(s)

  • Kasper Aas Hunnestad
  • Constantinos Hatzoglou
  • Muhammad Zeeshan Khalid
  • Per Erik Vullum
  • Zewu Yan
  • Edith Bourret
  • Antonius Van Helvoort
  • Sverre Magnus Selbach
  • Dennis Meier

Affiliation

  • Norwegian University of Science and Technology
  • SINTEF Industry / Materials and Nanotechnology
  • ETH Zurich
  • Lawrence Berkeley National Laboratory

Year

2022

Published in

Nature Communications

ISSN

2041-1723

Publisher

Springer Nature

Volume

13

Issue

1

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