Effect of pulling speed on oxygen related defects in Czochralski silicon ingots
Category
Poster
Language
English
Author(s)
- Gabriela Kazimiera Warden
- Mari Juel
- John Atle Bones
- Yu Hu
- Marisa Di Sabatino Lundberg
Affiliation
- Norwegian University of Science and Technology
- SINTEF Industry / Sustainable Energy Technology
- Unknown
Presented at
31st International Conference on Defects in Semiconductors
Date
26.07.2021 - 30.07.2021
