Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching

Client

• EEA - The Agreement on the European Economic Area / 323322

Author(s)

• Angela Baracu
• Christopher Andrew Dirdal
• Andrei Avram
• Adrian Dinescu
• Raluca Muller
• Geir Uri Jensen
• Paul Conrad Vaagen Thrane
• Hallvard Angelskår

Affiliation

• Romania
• SINTEF Digital / Smart Sensors and Microsystems

Issue

5

DOI

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