Modeling of Spring Constant and Pull-down Voltage of Non uniform RF MEMS Cantilever Incorporating Stress Gradient
Category
Academic article
Language
English
Author(s)
- Shimul Chandra Saha
- Ulrik Hanke
- Geir uri Jensen
- Trond Sæther
Affiliation
- Norwegian University of Science and Technology
- SINTEF
Year
2008Published in
Sensors & Transducers Journal
ISSN
2306-8515
Volume
98
Issue
11
Page(s)
54 - 68