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Modeling of Spring Constant and Pull-down Voltage of Non uniform RF MEMS Cantilever Incorporating Stress Gradient

Category

Academic article

Language

English

Author(s)

  • Shimul Chandra Saha
  • Ulrik Hanke
  • Geir uri Jensen
  • Trond Sæther

Affiliation

  • Norwegian University of Science and Technology
  • SINTEF

Year

2008

Published in

Sensors & Transducers Journal

ISSN

2306-8515

Volume

98

Issue

11

Page(s)

54 - 68

View this publication at Cristin