Capacitive differential pressure sensor for harsh environments

Category

Academic article

Language

English

Author(s)

Sigurd Moe
Kari Schjølberg-Henriksen
Dag Thorstein Wang
Eivind Lund
Jon Barratt Nysæther
Liv Furuberg
Maaike Margrete Visser Taklo
Truls Fallet
R. W. Bernstein

Affiliation

SINTEF Digital / Smart Sensors and Microsystems
University of Oslo
Unknown

Year

2000

Published in

Sensors and Actuators A-Physical

ISSN

0924-4247

Volume

83

Issue

1-3

Page(s)

30 - 33

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