Metallization scheme and release methods for fabrication of RF MEMS switches
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Category
Academic chapter/article/Conference paper
Language
English
Author(s)
- Shimul Chandra Saha
- Trond Sæther
- Geir uri Jensen
- Erik Poppe
- Håkon Sagberg
Affiliation
- Norwegian University of Science and Technology
- SINTEF
- Unknown
Year
2007Publisher
MNE 2007
Book
Proceedings of the 33rd Micro- and Nano- Engineering conference (MNE 2007)
Issue
1
ISBN
9-999-99999-9
Page(s)
773 - 774
