Modeling of Spring Constant and Pull-down Voltage of Non uniform RF MEMS Cantilever
Category
Academic chapter/article/Conference paper
Language
English
Author(s)
- Shimul Chandra Saha
- Ulrik Hanke
- Geir uri Jensen
- Trond Sæther
Affiliation
- Norwegian University of Science and Technology
- SINTEF
Year
2006Publisher
IEEE conference proceedings
Book
Proceedings of the 2006 IEEE International Behavioral Modeling and Simulation Conference
ISBN
0-7803-9742-8