Anodic bonding for monolithically integrated MEMS

Category

Academic article

Language

English

Author(s)

Kari Schjølberg-Henriksen
Geir Uri Jensen
Anders Hanneborg
Henrik Jakobsen

Affiliation

SINTEF Digital / Smart Sensors and Microsystems
Norwegian University of Science and Technology
University of South-Eastern Norway

Year

2004

Published in

Sensors and Actuators A-Physical

ISSN

0924-4247

Issue

A 114

Page(s)

332 - 339

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