Anodic bonding of glass to aluminum
Category
Academic article
Language
English
Author(s)
- Kari Schjølberg-Henriksen
- Erik Poppe
- Sigurd Moe
- Preben Storås
- Maaike Margrete Visser Taklo
- Dag Thorstein Wang
- Henrik Jakobsen
Affiliation
- SINTEF Digital / Smart Sensors and Microsystems
- Norwegian University of Science and Technology
- University of South-Eastern Norway
Year
2006Published in
Microsystem Technologies : Micro- and Nanosystems Information Storage and Processing Systems
ISSN
0946-7076
Publisher
Springer
Volume
12
Page(s)
441 - 450