Elemental distribution and oxygen deficiency of magnetron sputtered indium tin oxide films
Category
Academic article
Language
English
Author(s)
- Annett Thøgersen
- Margrethe Holmer Rein
- Edouard Monakhov
- Jeyanthinath Mayandi
- Spyridon Diplas
Affiliation
- Institute for Energy Technology
- University of Oslo
- SINTEF Industry / Sustainable Energy Technology
Year
2011Published in
Journal of Applied Physics
ISSN
0021-8979
Publisher
AIP Publishing (American Institute of Physics)
Volume
109
Issue
11
