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Dielectric properties of thin-film ZrO2 up to 50 GHz for RF MEMS switches

Abstract

Microwave characterization of bulk, thin and thick film ferroelectrics is considered in this chapter. Both single crystals and ceramics are discussed. The resonant techniques include disk, Courtney and composite resonator methods for characterization of the bulk ferroelectrics. The open resonator and split post dielectric resonator methods are considered for thick films. Resonator techniques for on-wafer characterization of the thin films and varactors include: microprobe resonator, transmission line resonator, and the near field scanning microscope. The broadband techniques include transmission/reflection method and methods based on coplanar lines and coupled microstrip lines. The methods for the measurement of the nonlinearities and tuning speeds also are considered.

Category

Academic article

Language

English

Author(s)

  • Deokki Min
  • Nils Hoivik
  • Geir Uri Jensen
  • Frode Tyholdt
  • Camilla Haavik
  • Ulrik Hanke

Affiliation

  • University of South-Eastern Norway
  • SINTEF Digital / Smart Sensors and Microsystems
  • SINTEF Industry / Sustainable Energy Technology

Year

2011

Published in

Applied Physics A: Materials Science & Processing

ISSN

0947-8396

Publisher

Springer

Volume

105

Issue

4

Page(s)

867 - 874

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