Low-temperature plasma activated bonding for a variable optical attenuator

Author(s)

• Kari Schjølberg-Henriksen
• Sigurd Moe
• Maaike Margrete Visser Taklo
• P Storas
• Jon Herman Ulvensøen

Affiliation

• SINTEF Digital / Smart Sensors and Microsystems
• Norwegian University of Science and Technology
• Unknown

Issue

1

DOI