Anodic bonding

Category

Academic chapter/article/Conference paper

Language

English

Author(s)

Adriana Cozma Lapadatu
Kari Schjølberg-Henriksen

Affiliation

SensoNor ASA
SINTEF Digital / Smart Sensors and Microsystems

Year

2012

Publisher

Wiley-VCH

Book

Handbook of wafer bonding

ISBN

978-3-527-32646-4

Page(s)

63 - 80

External resources

https://dx.doi.org/10.1002/9783527644223.CH₄

DOI

https://doi.org/10.1002/9783527644223.CH₄

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