Design and processing of a cost-effective piezoresistive MEMS cantilever sensor for medical and biomedical use

In this special section article, cost-effective methods for fabrication of a piezoresistive
cantilever sensor for industrial use are focused on. The intended use of the presented cantilever
is a medical application. A closer description of the cantilever design is given. The low-cost
processing sequence is presented and each processing step is explained in detail. The
processing sequence is also compared to other low-cost fabrication techniques. Results from
the electrical probing and mechanical strength test are given. The results demonstrate that the
chosen low-cost processing route results in high yield and a mechanical robust device