Abstract
Capacitive micromachined ultrasonic transducers
(CMUTs) have prospective clinical applications in ultrasound
diagnostics and therapy. We have modeled, fabricated, and
characterized CMUT arrays suitable for intravascular and
gastrointestinal use. The elements of the CMUT arrays are
connected from the back side of the array by through-siliconvias
(TSVs) with a pitch of 25 μm. In the reported work, the
presence of TSVs does not reduce the fill factor of the array.
Two different membrane designs were fabricated, resulting in a
resonance frequency in air of 35.6 and 41.0 MHz, respectively.
The measurements were in good agreement with the simulated
performance. The realized devices are promising for the
fabrication of a 3D-ready and bio-compatible device, suitable for
in vivo ultrasound applications.
(CMUTs) have prospective clinical applications in ultrasound
diagnostics and therapy. We have modeled, fabricated, and
characterized CMUT arrays suitable for intravascular and
gastrointestinal use. The elements of the CMUT arrays are
connected from the back side of the array by through-siliconvias
(TSVs) with a pitch of 25 μm. In the reported work, the
presence of TSVs does not reduce the fill factor of the array.
Two different membrane designs were fabricated, resulting in a
resonance frequency in air of 35.6 and 41.0 MHz, respectively.
The measurements were in good agreement with the simulated
performance. The realized devices are promising for the
fabrication of a 3D-ready and bio-compatible device, suitable for
in vivo ultrasound applications.
