The silicon/silicon-nitride interface revisited: phosphorus and nitrogen defects
Category
Academic lecture
Language
English
Author(s)
- Espen Flage-Larsen
- Espen Sagvolden
- Ole Martin Løvvik
- Jesper Friis
- Georg Kresse
- Chang Ming Fang
Affiliation
- SINTEF Industry / Sustainable Energy Technology
- SINTEF Industry / Materials and Nanotechnology
- Unknown
Presented at
MRS Fall Meeting
Place
Boston, MA
Date
25.11.2012 - 30.11.2012
Organizer
MRS