Integration of piezoelectric thin films in micro-electromechanical systems
RTD Partners:
SINTEF, Norway (Coordinator)
EPFL, Switzerland
University of Twente, The Netherlands
SME Partners:
aixACCT Systems GmbH, Germany
Noliac A/S, Denmark
Precision Acoustics Ltd., UK
Sonitor Technologies AS, Norway
Hök Instrument AB, Sweden
MEMS-pie is supported by the 6th Framework Programme of the European Commission, Co-operative Research Activities (CRAFT), contract no. COOP-CT-2004-508219.
Published October 27, 2006
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