Background
  • Piezoelectric thin films for integration with MEMS have been studied intensively at laboratory scale.

  • Innovative ideas for new types of sensors, actuators and other products based on silicon MEMS technology, especially in SMEs.

  • The production is very demanding. 

  • European FP6 project “MEMS-pie”, www.sintef.no/mems-pie.

Published October 22, 2007