Rate-Dependent Evolution of Microstructure and Stress in Silicon Films Deposited by Electron Beam Evaporation

Author(s)

• Runar Dahl-Hansen
• Marit Synnøve Sæverud Stange
• Tor Olav Sunde
• Alexander G. Ulyashin

Affiliation

• SINTEF Digital / Smart Sensors and Microsystems
• SINTEF Industry / Sustainable Energy Technology
• SINTEF Industry / Metal Production and Processing

Issue

7

DOI