Investigation of uniformity in fused quartz crucibles for Czochralski silicon ingots
Category
Academic article
Language
English
Author(s)
- Gabriela Kazimiera Warden
- Petra Ebbinghaus
- Martin Rabe
- Mari Juel
- Bartlomiej Gawel
- Andreas Erbe
- Marisa Di Sabatino
Affiliation
- Norwegian University of Science and Technology
- Germany
- SINTEF Industry
- Andre institusjoner
Year
2024Published in
Journal of Crystal Growth
ISSN
0022-0248
Publisher
Elsevier
Volume
645