Deposition of silica thin films formed by sol-gel method

Category

Academic article

Language

English

Author(s)

Hasan Guleryuz
Ingeborg Kaus
C Filiatre
Tor Grande
Mari-Ann Einarsrud

Affiliation

Norwegian University of Science and Technology
SINTEF Industry / Sustainable Energy Technology
France

Year

2010

Published in

Journal of Sol-Gel Science and Technology

ISSN

0928-0707

Publisher

Springer

Volume

54

Issue

2

Page(s)

249 - 257

DOI

https://doi.org/10.1007/s10971-010-2190-0

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