H-initiated extended defects from plasma treatment: Comparison between c-Si and mc-Si
Category
Academic lecture
Language
English
Author(s)
- Heidi Nordmark
- Alexander Ulyashin
- John Walmsley
- Randi Holmestad
Affiliation
- Norwegian University of Science and Technology
- SINTEF
Presented at
International Conference on Extended Defects in Semiconductors (EDS2010)
Place
Brighton
Date
19.09.2010 - 24.09.2010