A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror

Category

Academic article

Language

English

Author(s)

Thor Bakke
Andreas Vogl
Oleg Zero
Frode Tyholdt
Ib-Rune Johansen
Dag Thorstein Wang

Affiliation

SINTEF Digital / Smart Sensors and Microsystems
Norwegian University of Science and Technology

Year

2010

Published in

Journal of Micromechanics and Microengineering (JMM)

ISSN

0960-1317

Publisher

IOP Publishing

Volume

20

Issue

6

DOI

https://doi.org/10.1088/0960-1317/20/6/064010

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